City University of New York (CUNY) Installs Elionix Electron Beam Lithography System
Published on Wednesday, 13 May 2015 13:50
Written by Administrator
Elionix Inc., a world leader in electron beam lithography, announces the delivery of the Elionix ELS-G100 to CUNY's Advanced Science Research Center
||The Advanced Science Research Center (ASRC) is home to CUNY's first NanoFabrication Facility (NanoFab). The ASRC NanoFab operates a 5,000 square foot cleanroom for advanced nanofabrication and characterization. The ASRC is among the most advanced cleanroom facilities on the East Coast.
North Billerica, MA May 12, 2015
SEMTech Solutions, in partnership with Elionix, is pleased to announce the delivery of a 100kV Electron Beam Lithography (EBL) system to the City University of New York’s (CUNY) Advanced Science Research Center (ASRC). The ASRC focuses CUNY initiatives in five dynamic fields of applied science: Nanoscience, Photonics, Structural Biology, Neuroscience and Environmental Sciences. The NanoFabrication unit will enable the fabrication and characterization of a wide range of micro and nano structures.
The Elionix ELS-G100 is capable of generating patterns with a line width of 6nm. The system provides a stable 1.8nm electron beam using high beam currents at 100kV accelerating voltage. The system’s Windows™ based Graphical User Interface (GUI) provides for ease of use in a diverse, multi-user environment. These features are becoming the standard in universities worldwide.
“The Elionix Electron Beam Lithography system will enable us to routinely write patterns of less than 10 nanometers in size,” says Dr. Jacob Trevino, NanoFabrication Facility Director. “We will count on this system to aid researchers in developing novel micro and nanoscale devices, such as nanophotonic and solid state circuits, microelectromechanical systems and microfluidic systems.”
The Elionix model ELS-G100 is a recent product launch that incorporates a new 100MHz high-speed deflection system. According to Ken Koseki, Overseas Sales Manager for Elionix in Japan, “This system offers up to 10 times the throughput of our previous generation EBL tools.” Further, he states, “We are excited that so many graduates of CUNY colleges have won Nobel Prizes throughout the years and we look forward to being a trusted and reliable partner. It is our hope that this system will contribute to the launch of many successful initiatives undertaken by CUNY.”