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Lithography
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New Product Highlight: Elionix ELS-7800 |
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The ELS-7800 Electron Beam Lithography system, an 80kV tool, is the most recent introduction from Elionix. The ELS-7800 offers high performance (8nm lines) and small footprint. Several of these systems are in operation in Asia, and are now being offered in North America. ELS-7800 Brochure (2.46 MB) >>  Elionix ELS-7800 80 kV EBL System
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ELS-7500EX **50kV e-Beam Lithography |
ELS-7500 EX Features: - It is capable of drawing lines of 10nm width.
- Laser interferometer reads stage position with 0.6nm resolution and helps to achieve at 50nm of stitching and overlay accuracy.
- The use of 18bit DAC provides electron beam positioning with 0.31nm resolution.
- The system is operated completely from a PC and is easy to use.
Brochure: ELS-7500EX (809 KB pdf) |
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ELS-7000 **100kV e-Beam Lithography |
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The ELS-7000 features:
- Employing a large electron current and the maximum acceleration of 100kV, the electron beam of the minimum diameter of 1.8nm is kept stable for a long interval. Even with the resists commonly available on the market, patterns finer than 8nm can be exposed. Based on the achievements of the preceding model, the ELS-7700, the ELS-7000 realized both the long-interval fine electron beam stability and the high throughput.
- ELS-7000 is equipped with a highly rigid stage, which is based on our long experience in developing lithography systems. The 0.31nm beam positioning resolution is realized by utilizing the 18bit DAC. And, by employing a laser interferometer whose reading resolution is 0.6nm, both the stitching accuracy and overlaying accuracy have attained 40nm. ELS-7000 can expose fine patterns across a large area.
- Functions for exposing essential elementary graphic patterns are included in the standard specification. The optional circle pattern generator allows generating such patterns as circumferences and arcs. By attaching the fine-step field size modulation function, ELS-7000 can also be instrumental in creating WDM diffraction gratings.
Brochure: ELS-7000 (834 KB pdf) |
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