Duke purchases first Elionix 50 kV EBL System

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Published on Monday, 04 June 2007 12:32

Written by Administrator

SEMTech Solutions, Inc. has announced that it will deliver the first Elionix 50 kV Electron Beam Lithography (EBL) System to Duke University in October 2007.  It will be in operation at Duke's Shared Materials Instrumentation Facility (SMIF).  Although this is the first system in the United States, over 30 have been installed across Asia in the last three years.   For the press release, click here (98 KB pdf).