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City University of New York to Install Elionix Electron Beam Lithography System

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City University of New York to Install Elionix Electron Beam Lithography System



SEMTech Solutions, in partnership with Elionix, is pleased to announce the delivery of a 100kV Electron Beam Lithography (EBL) system to the City University of New York’s (CUNY) Advanced Science Research Center (ASRC). “The Elionix Electron Beam Lithography system will enable us to routinely write patterns of less than 10 nanometers in size,” says Dr. Jacob Trevino, NanoFabrication Facility Director. “We will count on this system to aid researchers in developing novel micro and nanoscale devices, such as nanophotonic and solid state circuits, microelectromechanical systems and microfluidic systems.” Read More >>

October 23, 2015